A Built-In CMOS Temperature Sensor for On-Chip Thermal Monitoring from 0°C to 100°C with a 0.137°C of Innacuracy

Abstract

This work presents an temperature sensor designed in a 22 nm process, using the 22-FDX design kit for this purpose. This sensor utilizes the threshold voltage and carrier mobility dependence on the temperature for voltage conversion, covering a temperature range of 0° C to 100° C. A key contribution of this work is the exceptionally low error of +0.137^\circ mC and-0.075^\circ mC achieved after a simulated one-point calibration. In addition, this device achieves a temperature coefficient of-1.69 mV / ^\circ mC in the whole temperature range. It also consumes 23.11 μ mA from a 0.8 V DC supply and has an estimated die area of 5024.9 μ mm^2 (based on the schematic), of which approximately 5000 μ mm^2 correspond to two MOM capacitors. These capacitors are required for stand-Alone measurement, but in real-life scenarios, part of this capacitance corresponds to the load capacitance seen when an ADC is connected to the sensor's output. This temperature sensor is suitable for high-Accuracy on-chip applications, standing out for its trade-off between area, temperature range, power consumption, error and temperature coefficient.