Please use this identifier to cite or link to this item: http://hdl.handle.net/10553/111514
Title: A design tool for pressure microsensors based on FEM simulations
Authors: Bistué, Guillermo
Elizalde, Jorge García
Garcia-Alonso Montoya, Santiago 
Castaño, Enrique
Gracia, F. Javier
García-Alonso, Andrés
UNESCO Clasification: 3307 Tecnología electrónica
Keywords: Microsensors
Pressure
Silicon
Simulation
Issue Date: 1997
Journal: Sensors and Actuators, A: Physical 
Abstract: The main features involved in the design of a pressure sensor are the maximum non-destructive pressure and the sensitivity. In this work, these two characteristics are related to the following design variables: dimensions of the membrane and mechanical properties of the selected material. Von Misses stress and strain distributions have been calculated by the finite-element method (FEM). The knowledge of these distributions is a good design guideline for an accurate location of the piezoresistors. The results obtained have been applied to the design of silicon microsensors for biomedical and domestic applications. © 1997 Elsevier Science S.A.
URI: http://hdl.handle.net/10553/111514
ISSN: 0924-4247
DOI: 10.1016/S0924-4247(97)01598-7
Source: Sensors and Actuators, A: Physical [ISSN 0924-4247], v. 62(1-3), p. 591-594
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