Identificador persistente para citar o vincular este elemento:
http://hdl.handle.net/10553/49640
| Título: | Digital output MEMS pressure sensor using capacitance-to-time converter | Autores/as: | Montiel-Nelson, J. A. Sosa González, Carlos Javier Pulido, R. Beriain, A. Solar, H. Berenguer, R. |
Clasificación UNESCO: | 330790 Microelectrónica | Palabras clave: | Micromechanical devices Capacitance Oscillators Transducers Electrostatics, et al. |
Fecha de publicación: | 2014 | Publicación seriada: | Proceedings of the 2014 29th Conference on Design of Circuits and Integrated Systems, DCIS 2014 | Conferencia: | 2014 29th Conference on Design of Circuits and Integrated Systems, DCIS 2014 | Resumen: | In this paper, a MEMS capacitive pressure sensor and a capacitance to digital converter are presented. The MEMS transducer has been designed and fabricated using MetalMUMPs process from MEMSCAP. For an diaphragm area of 600×600 μm2 and an electrostatic pressure variation up to 30 kPa, the MEMS exhibits a capacitance change from 9.3 pF to 13.4 pF, with a INL of 0.2% A capacitance to digital converter has been designed and fabricated in a low cost 2P4M 0.35μm CMOS standard process as a digital interface to the MEMS sensor. The measured resolution of 7.9 bit and power consumption of 16.56 μW demonstrate that by combining both devices a long range passive RFID sensor for pressure measurements up to 30 kPa is achieved. | URI: | http://hdl.handle.net/10553/49640 | ISBN: | 9781479957439 | DOI: | 10.1109/DCIS.2014.7035565 | Fuente: | Proceedings of the 2014 29th Conference on Design of Circuits and Integrated Systems, DCIS 2014 (7035565) |
| Colección: | Actas de congresos |
Los elementos en ULPGC accedaCRIS están protegidos por derechos de autor con todos los derechos reservados, a menos que se indique lo contrario.