|Title:||Digital output MEMS pressure sensor using capacitance-to-time converter||Authors:||Montiel-Nelson, J. A.
Sosa González, Carlos Javier
|UNESCO Clasification:||330790 Microelectrónica||Keywords:||Micromechanical devices
Electrostatics, et al
|Issue Date:||2014||Journal:||Proceedings of the 2014 29th Conference on Design of Circuits and Integrated Systems, DCIS 2014||Conference:||2014 29th Conference on Design of Circuits and Integrated Systems, DCIS 2014||Abstract:||In this paper, a MEMS capacitive pressure sensor and a capacitance to digital converter are presented. The MEMS transducer has been designed and fabricated using MetalMUMPs process from MEMSCAP. For an diaphragm area of 600×600 μm2 and an electrostatic pressure variation up to 30 kPa, the MEMS exhibits a capacitance change from 9.3 pF to 13.4 pF, with a INL of 0.2% A capacitance to digital converter has been designed and fabricated in a low cost 2P4M 0.35μm CMOS standard process as a digital interface to the MEMS sensor. The measured resolution of 7.9 bit and power consumption of 16.56 μW demonstrate that by combining both devices a long range passive RFID sensor for pressure measurements up to 30 kPa is achieved.||URI:||http://hdl.handle.net/10553/49640||ISBN:||9781479957439||DOI:||10.1109/DCIS.2014.7035565||Source:||Proceedings of the 2014 29th Conference on Design of Circuits and Integrated Systems, DCIS 2014 (7035565)|
|Appears in Collections:||Actas de congresos|
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