Accurate planar spiral inductor simulations with a 2.5-D electromagnetic simulator

Abstract

Different published approaches to simulate an inductor, by means of the 2D electromagnetic tool Momentum (c), are revised in this article. A new layout configuration, including the measurement structure and postsimulation de-embedding, is proposed. Simulated results are verified with inductors fabricated in a SiGe 0.35-mu m foundry process. Our proposed layout provides more reliable results than other configurations. (C) 2008 Wiley Periodicals, Inc.