Single-step synthesis of doped TiO2 stratified thin-films by atmospheric-pressure chemical vapour deposition

Abstract

Locally doped TiO2 thin-films were engineered by pulsed precursor delivery using atmospheric-pressure chemical vapour deposition. To our knowledge, this is the first example of stratified films deposited in this manner. The optical, structural and morphological properties of the films were investigated using absorption spectroscopy, X-ray diffraction and electron microscopy techniques. Nitrogen-doped TiO2 stratified thin-films were produced as proof that the new technique would work and that the nature and location of nitrogen species within the films could be studied by X-ray photoelectron spectroscopy. The photocatalytic performance of the films was investigated using the photodegradation of a model organic pollutant (stearic acid). The impact of a stratified configuration and the influence of the type of nitrogen species on enhanced photocatalytic activity are discussed.