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http://hdl.handle.net/10553/49641
Title: | A very low power 7.9 bit MEMS pressure sensor suitable for batteryless RFID applications | Authors: | Beriain, A. Solar, H. Berenguer, R. Montiel-Nelson, J. A. Sosa, J. Pulido, R. Garcia-Alonso Montoya, Santiago |
UNESCO Clasification: | 330790 Microelectrónica | Keywords: | MEMS CMOS RFID pressure sensor low-power sensor |
Issue Date: | 2014 | Journal: | Midwest Symposium on Circuits and Systems | Conference: | 57th IEEE International Midwest Symposium on Circuits and Systems (MWSCAS) | Abstract: | There is a strong motivation for the development of new low power sensors for wireless passive applications such as RFID. In this work, a combination of a MEMS capacitive pressure transducer and a capacitive to digital converter compatible with a sensor enabled RFID tag are presented. The MEMS transducer has been designed and fabricated using a MetalMUMPs process. Its characterization showed an output variation between 9.3 pF and 13.4 pF corresponding to a pressure variation between 0 kPa and 30 kPa, with a INL of 0,2%. On the other hand, the capacitance to digital converter has been implemented in a low cost 2P4M 0.35 mu m CMOS standard process. The interface measurements showed a resolution of 7.8 bit and an average power consumption of 16.56 mu W. Combining both devices together with a sensor enabled RFID tag, a long range passive RFID sensor for pressure measurements up to 30 kPa could be implemented. | URI: | http://hdl.handle.net/10553/49641 | ISBN: | 9781479941346 | ISSN: | 1548-3746 | DOI: | 10.1109/MWSCAS.2014.6908431 | Source: | Midwest Symposium on Circuits and Systems[ISSN 1548-3746] (6908431), p. 378-381 |
Appears in Collections: | Actas de congresos |
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